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Semi-automatic Panel FOUP (for Panel FOUP)

Model: NFC-HP510

Category: Dry and Wet Process Equipment

Exhibitor: ASIA NEO TECH INDUSTRIAL CO., LTD.

Booth No: 633

Characteristic

?Semi-automatic Panel FOUP cleaning device, easy to operate and high cleaning efficiency, and can handle a variety of large Panel FOUP.
?Various recipes can be set according to the characteristics of each Panel FOUP, and recipe parameters can be stored.
?High-speed rotation/XCDA air blowing/hot air + IR baking and drying the Panel FOUP.
?High-pressure dust-free hot air knife to remove water
?UPH 4pcs/hr

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