BUSCH COBRA SEMICON Dry screw vacuum pumps

Model: BUSCH COBRA DS 0600 E

Booth No: R1028

Characteristic

COBRA Semicon dry screw vacuum pumps are the ideal choice for all demanding processes in the production of photovoltaic cells, flat screens, semiconductors, and in numerous industrial coating applications.
The operating principle of COBRA Semicon is based on our state-of-the-art screw technology. With their patented self-balancing screws, they set new standards in terms of efficiency.
COBRA Semicon combine large throughputs with high vapor and particle tolerance. Particle-laden media can therefore be evacuated without any problems.
The oil- and contact-free operating principle ensures low maintenance requirements, low operating costs and a long life cycle.
The compact dimensions of COBRA Semicon make installation easy – even in confined spaces.

COBRA DS dry screw vacuum pumps are the ideal vacuum generators for demanding processes. Even under conditions in which a high hydrogen throughput is required. They are therefore perfectly suited for chemical vapor deposition, rapid thermal processing or atomic layer deposition.
Various sizes of the COBRA DS series feature an integrated high-performance vacuum booster. This combination of backing pump and vacuum booster allows to achieve increased pumping speeds and ultimate pressures.
The patented self-balancing screw design ensures excellent powder handling and high uptime.
The screws of COBRA DS vacuum pumps are manufactured from a single-piece casting avoiding any gaps. This makes an ingress of process fluids or particles impossible. Thus, corrosion and deposition are prevented.
COBRA DS series vacuum pumps use effective, indirect water cooling. As a result, the temperature distribution throughout the pump body can be controlled. A response to process variations is possible at any time.
Due to their fit-in-place design, COBRA DS can be easily and quickly retrofitted to existing systems.