SD Optics Develops 3D Line Scanner to Test Semiconductor and Display Defects in 3D
Exhibitor: SD OPTICS, INC.
Date: 2023-06-29
Booth No.: P820
SD OPTICS (SD OPTICS) has released a 3D line scanner that performs 3D inspection in real time. It is possible to quickly inspect a subject with a height (step) and obtain a high-definition 3D image.
Line inspection is easy to obtain a 2D image, but 3D image acquisition has high technical difficulty.
This is because the focus of the scanner camera lens needs to be readjusted due to different subject heights.
Whenever the inspection line moves, the focus must be renewed.
There are 3D line scanners that can be scanned with some automatic focus, but it takes a long time and the image is not clear because an actuator or motor is used to move the lens.
Even this depends on foreign products.
SD Optics solved this problem with a high-speed variable focus element.
An element is a kind of digital lens. It is made of micro-precision mechanical technology (MEMS) and is smaller than 1cm, but contains 8,000 ultra-fine mirrors inside.
It moves ultra-fine mirrors through voltage and controls the angle of light to focus in real time.It is similar to focusing the lens of the human eye with a different shape.
SD Optics is the only company that has secured this technology.
Seo Chung-soo the CEO of SD Optics said, "The speed of inspecting semiconductor wafers and display panels is so fast that not only samples but also full inspection is possible," adding, "We plan to diversify our product portfolio using high-speed variable focus devices such as 3D line scanners."
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