Vacuum system with PECVD technology DIAMANTA
Category: Precision Optics
Exhibitor: I-PHOTONICS/GSI
Booth No: P1121
Characteristic
DIAMANTA vacuum system is engineered for the deposition of wear resistant diamond-like carbon (DLC) coatings on silicon and germanium substrates. The DLC coatings are anti-reflective in the IR range in 3-5 μm and 7-14 μm.
The deposition method is the chemical deposition of carbon from the gas phase stimulated by plasma of ion beam source.
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