Nanopositioning Piezo Stages
Category: Machine Tool & Machinery
Exhibitor: PHYSIK INSTRUMENTE (PI) TAIWAN LTD.
Booth No: I1322
PI's piezo stage combine sub-nanopositioning and guiding precision with minimum crosstalk. This makes them particularly suitable for application in metorlogy, for super resolution microscopy, for interferometry or in inspection systems for semiconductor chip production.
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